Ultrasonic nano/microfabrication, handling and driving is an emerging actuation technology, which utilizes ultrasonic vibration and the physical effects of ultrasonic vibration in fluids and solids to implement the fabrication, handling and driving of nano/micro scale objects. This book provides readers with the fundamentals, principles and characteristics of the ultrasonic devices for nano/micro fabrication, handling and driving, and design methods of the devices.Introduces ...

Demands for high-performance micro/nano manipulations, from the manufacture of microelectronic and photonic devices, biomedical apparatus, nanoscience and nanotechnology, renewable energy, environment protection, and high-end appliances, have been rapidly increasing in recent years. However, there are very few books on ultrasonic manipulation technology, which is one of the important means in micro/nano manipulations.This unique title gives the basic physical principles of ultrasonic micro...