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Nanofabrication
Nanolithography techniques and their applications
- by
- Professor Francesc Perez MuranoProfessor José Ignacio MartínDr Vito ClericòDr Mario AmadoProf Enrique DiezDr Javier Pablo-NavarroDr César MagénDr Soraya SangiaoMr Pablo OrúsDr. Rosa CórdobaProfessor Ricardo GarcíaProfessor Isabel RodríguezDr. Jaime HernándezProfessor Guillermo VillanuevaDr. Oscar Vázquez MenaDr Ding ZhaoProfessor Min QiuProfessor Anpan HanDr. Edoardo AlbisettiProf. Daniela PettiProf. Riccardo BertaccoProf. Elisa RiedoDr Claire DonnellyDr Dédalo Sanz-HernándezDr Lucas Perez GarciaDr Amalio Fernández-PachecoProfessor Andrei FedorovProfessor Songkil Kim
- Series -
- IOP ebooks
2020
EN
A comprehensive edited volume on important and up-to-date nanolithography techniques and applications. The book includes an introduction on the importance of nanolithography in today’s research and technology, providing examples of its applications.The remainder of the book is split into two sections. The first section contains the most important and established nanolithography techniques. As well as a detailed description of each technique, the reader can obtain useful information...
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