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  • Micro-Nano Manufacturing and Micro-Electro-Mechanical Systems

    Serier serie Engineering (R0)
    This book is a well-structured textbook that systematically introduces the basic concepts, process technologies, typical devices, and system applications related to micro-nano manufacturing and micro-electromechanical systems (MEMS). The book is divided into eight chapters, including the concept and development of MEMS, principles and application examples of bulk and surface silicon process, ... Læs mere

    840,47 kr.