Flexible Piezoelectric Energy Harvesters and SensorsA systematic and complete discussion of the latest progress in flexible piezoelectric energy harvesting and sensing technologiesIn Flexible Piezoelectric Energy Harvesters and Sensors, a team of distinguished researchers delivers a comprehensive exploration of the design methods, working mechanisms, microfabrication processes, and applications of flexible energy harvesters for wea...

A comprehensive guide to 3D MEMS packaging methods and solutionsWritten by experts in the field, Advanced MEMS Packaging serves as a valuable reference for those faced with the challenges created by the ever-increasing interest in MEMS devices and packaging. This authoritative guide presents cutting-edge MEMS (microelectromechanical systems) packaging techniques, such as low-temperature C2W and W2W bonding and 3D packaging.This definitive resource helps you selec...

This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoelectromechanical (NEMS) with nanophotonic elements is creating powerful new photonic devices and systems including MEMS micromirrors, MEMS tunable filters, MEMS-based adjustable lenses and apertures, NEMS-driven variable silicon nanowire waveguide couplers, and NEMS tunable photonic crystal nanocavities. The book also addresses system...